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Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection
Integrated MEMS/NEMS Resonant Cantilevers Ultrasensitive Biological Detection
2009/9/4
The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elem...